Cov ntau - arc txheej tshuab ua kom muaj cov ntshav siab (4}}}} thickness uniformity ± 5%). Nws cov tub ntxhais lub tshuab nqus tsev yuav muab faib ua cov txheej txheej txheej (lub tshuab nqus tsev me dua lossis sib npaug nrog 10 ^ - 3pa) thiab ib qho chamber pramber. Tus qub ua kom sawv daws ib puag ncig qis, thiab tom kawg yog siv rau kev tu substrate thiab polishing los txhim kho adchesion. Cov txheej txheem tseem ceeb muaj xws li arc source zog (20-200a), uas yuav tsum tau hloov kho dua tshiab (xws li cov khoom sib dhos kom zoo nkauj) thiab cov khoom siv (hlau / tej hub sib xyaw. Nws yog qhov haum rau scenes xws li optical lens tiv thaiv kev tiv thaiv kev ua yeeb yaj kiab thiab cov cuab yeej nyuaj.
