Hauv kuv lub teb chaws lub tshuab nqus tsev txheej kev lag luam, cov ntawv thov tam sim no yog tsom rau kev kho kom zoo nkauj. Txawm li cas los xij, cov txheej txheem kho kom zoo nkauj yog maj mam hloov mus rau tus qauv uas ua ke nrog kev hnav tsis kam thiab kev zoo nkauj, uas yog qhov kev txhim kho zoo heev rau kev txhim kho cov txheej txheem thev naus laus zis ntawm lub tshuab nqus tsev txheej khoom tsim thiab kev nce qib ntawm lub tshuab nqus tsev ion plating.
Tsis tas li ntawd, daim ntawv thov ntawm kev npaj hnav- tiv taus thiab kev sib txhuam- txo cov zaj duab xis rau lwm cov khoom tseem ceeb tau ua tus qauv zoo heev hauv kev txuag hluav taws xob thiab txhim kho kev ua haujlwm. Nws tuaj yeem hloov qee yam ntawm cov txheej txheem electroplating qub thiab ua lub luag haujlwm zoo heev hauv kev tiv thaiv ib puag ncig.
Tam sim no, feem ntau mechanically functional hard nyias films (tshwj xeeb yog cov cuab yeej txiav) thoob ntiaj teb siv cathodic arc deposition (CAD). Txawm li cas los xij, ib qho teeb meem tseem ceeb ntawm CAD yog qhov ua rau cov yeeb yaj kiab nto qhov tsis muaj qhov smoothness thiab muaj ntau cov khoom, cuam tshuam rau kev ua haujlwm ntawm daim ntawv thov. Qhov teeb meem no yog qhov tshwj xeeb tshaj yog nrog cov khoom siv CAD hauv tsev. Thaum qhia cov tshuab nqus hlau nplaum tuaj yeem daws qhov teeb meem particle, qhov kev tso nyiaj tso tawm tsuas yog kwv yees li 1/10 ntawm qhov qub, thiab qhov chaw tso tawm me me, ua rau lub voj voog ntau lawm, cov nqi tsim khoom siab, thiab tsis tsim nyog rau ntau lawm. Hauv qhov sib piv, magnetron sputtering thev naus laus zis tsim cov yeeb yaj kiab uas muaj qhov sib luag, zoo nkauj, nruab nrab ntawm qhov tso nyiaj, thiab muaj peev xwm ua kom zoo ib yam tso cov yeeb yaj kiab nyias mus rau thaj chaw loj.
Txawm li cas los xij, magnetron sputtering thev naus laus zis kuj tseem muaj qhov tsis zoo, xws li qis ionization tus nqi (feem ntau nyob ib ncig ntawm 10%), ua rau cov yeeb yaj kiab uas tsis zoo rau cov uas tau npaj los ntawm cathodic arc sputtering hais txog hardness, hnav tsis kam, thiab adhesion. Thaum ua cov txheej txheem chemically reactive (xws li TiN thiab TiO2), qhov tsawg ionization tus nqi thiab tsis zoo reactivity ntawm cov hlau hais yuav tsum tau qhia cov reactive gases ntau dhau lawm, uas tuaj yeem ua rau lub hom phiaj magnetron nto (tshuaj tshuaj tiv thaiv), ua rau muaj ntau yam avalanche- zoo li qhov tshwm sim, xws li kev txo qis hauv eva. Qhov no ua rau magnetron sputtering reactive coatings unstable thiab uncontrolled.
Yog li ntawd, multifunctional ion nqus txheej tshuab tau tshwm sim hauv khw. Los ntawm kev sim dav dav thiab kev siv hauv kev lag luam, qhov project no tau kos cov lus xaus hauv qab no:
(1) Tus tsim multifunctional ion txheej tshuab combining ntau txheej technologies tau ua tiav, thiab tag nrho cov kev ua tau zoo ntawm cov txheej txheem tsim yog ua nyob rau hauv Suav teb.
(2) Cov cuab yeej no tuaj yeem npaj loj- cheeb tsam, qis- nqi, du, ntom, thiab siab -kev ua tau zoo pob zeb diamond-xws li carbon (DLC) zaj duab xis thiab hlau nitride (los yog carbide) multi-cov ntsiab lus multilayer films nrog cov khoom zoo heev.
(3) Kev siv tshwj xeeb multilayer gradient intermediate hloov txheej txheej thiab doping thev naus laus zis txo cov kev ntxhov siab sab hauv, txhim kho zaj duab xis / substrate adhesion, thiab txhawb kev loj hlob ntawm zaj duab xis (txog 6 hli tuab).
(4) DLC zaj duab xis npaj muaj kev ua tau zoo heev: hardness> 20 GPa (txog 37.25 GPa), adjustable thickness (txog 6 hli), zaj duab xis / substrate adhesion> 50 N (txog 100 N), coefficient ntawm kev sib txhuam <0.2, thiab ib tug du thiab muag heev zaj duab xis.
(5) Cov tsim matrix / Cr / CrN / CrTiAlN / CrTiAlCN / CrTiC / DLC multi-element multilayer hnav-resistant thiab tshav kub- tiv taus tus kheej-lubricating txheej nthuav tawm cov kev ua tau zoo tshaj plaws: hardness txog 28.7 GPa / 1ub-4 mm thickness adjustable, zoo kawg nkaus daim ntawv cog lus 70 N, thiab coefficient ntawm kev sib txhuam tsawg dua 0.2.
(6) Tus tsim hnav- tiv taus thiab kev sib txhuam- txo cov zaj duab xis tau ua tiav rau ntau yam siab- cov pwm precision thiab precision qhov tseem ceeb. Cov txiaj ntsig ntawm daim ntawv thov qhia tau hais tias qhov ua kom muaj zog ntawm cov yeeb yaj kiab yog qhov tseem ceeb, uas tuaj yeem txhim kho cov khoom zoo thiab kev pab cuam lub neej.
