Electron tsaj evaporation nqus plua plav cov khoom siv feem ntau yog siv rau cov yeeb yaj kiab AR / AF yog cov yeeb yaj kiab zoo nkauj, thiab cov yeeb yaj kiab bandpass, thiab HR cov yeeb yaj kiab. Nws khav tau zoo xws li kev ua haujlwm siab, muaj zog ntau lawm ntau lawm, thiab qis dua cov nqi ntau lawm. Rau ar films (substrate iav transmitus> 91.5%), hauv 42 {{{{{{{{{{{{{{{{}% thiab kev xav txog <0.5% (nruab nrab). Ob-sided ob tog nruab nrab hloov chaw los pauv> 98% thiab kev xav txog <0.5% (nruab nrab). Nws muaj kev siv cov kev lag luam dav.
Lub tshuab nqus cua Propaporation oating tshuab koom nrog tso cov khoom evaporating hauv dej {} txias} cua txias nws nrog hluav taws xob nqaj. Cov khoom siv evaporating vaporizes thiab tom qab ntawd condenses mus rau sab saum npoo av los ua zaj duab xis. Qhov no yog ib txoj kev ua cua sov tseem ceeb thiab kev tsim kho cov qauv hauv cov tshuab nqus txheej thev naus laus zis. Electron nqaj evaporation kov ntau cov kev tawm ntawm cov pa tawm cua sov {{4 5} {{purity {purity purity cov ntaub ntawv zaj duab xis nyias nyias.
Lub Tshuab Nqus Tsev Evapacorate, uas yog nyob rau hauv electron nqaj barpaporation, suav nrog phom los ntawm daim ntawv hluav taws xob evaporation, xws li phom nplhaib, e {} pawb phom, thiab hollow canhode elecom phom.
Ib lub phom ntiv nplhaib emits hluav taws xob nqaj ntawm lub nplhaib - zoo li cov cathod. Tom qab tau tsom mus rau thiab deflected, lub nqaj tsoo ib daim Crucible, ua rau cov hlau los ua kom yaj. Nws cov qauv yog qhov yooj yim, tab sis nws lub zog thiab efficiency yog tsawg, ua rau nws feem ntau yog cov khoom lag luam kuaj; Nws yog tsis siv nyob rau hauv cov chaw tsim khoom.
Ib rab phom ncaj yog ib rab phom ntev ua haujlwm tawm ntawm lub ntsej muag zoo, thiab tom qab ntawd ntaus cov ntoo khaub zig, melting thiab evaporating cov khoom txheej txheej. Cov phom ncaj ntau hauv lub zog los ntawm ntau pua watts rau ntau pua kilowatts; Ib txhia yog siv rau lub tshuab nqus dej evaporation, thaum lwm tus siv rau lub tshuab nqus tsev smelting. Qhov tsis zoo ntawm cov phom ncaj yog tias cov khoom siv cov neeg lim dej uas tsis huv tuaj yeem paug phom tus qauv, ua rau muaj qhov tsis ruaj khov. Ib qho ntxiv, Sodium ions sawv ntawm cov lus qhia kuj tseem tuaj yeem paug cov txheej. Tsis ntev los no, lub tuam txhab German West tau tsim kev txhim kho rab phom ncaj los ntawm kev ntxiv cov hluav taws xob nqaj tawm thiab muab kev khiav tawm ntawm kev tawm tsam ywj pheej ntawm cov ntsiab lus. Qhov no tsis tsuas yog tshem tawm cov ntsiab lus tsis huv ntawm cov txheej txheej tab sis kuj tseem txhim kho cov phom lub neej.
Cov E -} Hom Phom Hluav Taws Xob, nrog rau qhov tsis txaus ntseeg ntawm kev ncaj ncees ntawm cov khoom hluav taws xob evaporation thiab yog ib qho ntawm feem ntau siv electron nqaj dav. Cov e - Hom phom rau hluav taws xob muaj peev xwm tsim cov khoom siv hluav taws xob siab, thiab ua kom muaj zog ntawm cov yeeb yaj kiab thiab cov yeeb yaj kiab zoo nkauj thiab zoo nkauj. Cov neeg tsis zoo yog tus phom hluav taws xob yuav tsum muaj cov qauv hluav taws xob siab, uas ua rau muaj kev nyab xeeb ntau cov cuab yeej, kev nyab xeeb tsis zoo, nyuaj rau kev saib xyuas, thiab tus nqi siab.
Hollow Cathode Cov Hluav Taws Xob Hluav Taws Xob Siv Hluav Taws Xob uas tau siv los ntawm qhov qis {{- tam sim no hollow catreore tawm raws li nws cov cua sov. Nws siv lub hollow tantalum raj raws li cricehode, ib tug crucible raws li anode, thiab ib qho kev ntsuas ntawm tantalum raj. Thaum lub sij hawm vapor deposition siv Hollow Cathode Cov Hluav Taws Xob Hluav Taws Xob, cov lej ionization siab, ua rau muaj cov yeeb yaj kiab siab. Lub Hollow Cathode Cov Hluav Taws Xob Hluav Taws Xob uas yuav tsum muaj rab phom electron ntau dua li cov khoom siv hluav taws xob, ua kom cov khoom siv hluav taws xob tsawg dua, nyab xeeb dua. Tam sim no, ob qho tib si e {- yam thiab hollow canhode siv rau vapor deposition thiab ion plating khoom hauv peb lub tebchaws. Cov phom phom tuaj yeem nce kaum txhiab kilowatts, thiab ntau cov yeeb yaj kiab nyias tau tso rau kev lag luam xws li Machinery thiab hluav taws xob.
Qhov zoo ntawm cov evaporation qhov chaw nyob rau hauv electron nqaj evaporation nqus cov khoom siv yog:
1) Cov hluav taws xob nqaj foob pob hluav taws xob kub muaj qhov ua tiav siab, ua tiav lub zog siab dua li kev tiv thaiv cua sov. Nws tuaj yeem teb cov khoom siv tau los txog 3000 degrees Celsius nrog tus nqi evaporation siab siab;
2) Vim tias cov khoom siv tau evaporated tau muab tso rau hauv dej {{txias crucible, uas yog qhov tseem ceeb rau kev txhim kho lub purity ntawm txheej;
3) Cov cua sov tuaj yeem thov ncaj qha rau cov npoo ntawm cov khoom siv evaporic, ua rau muaj kev kub ua kom sov thiab tsawg dua los ntawm kev kub thiab hluav taws xob.
