Dov - rau -}}}} dob cov khoom siv nqus plua plav tau pom zoo dua 30 xyoo dhau los. Cov khoom coated tau siv dav hauv kev kho kom zoo nkauj, muaj peev xwm ntim, thiab lwm thaj yeeb yaj kiab, thiab lwm cov yeeb yaj kiab, hluav taws xob, hluav taws xob. Nws cov ntawv thov yog qhov dav dav heev, nrog cov substrates ntau xws li PE, Tsiaj, PI, PP, PP, ntawv, ua npuas ncauj plastics, thiab cov ntaub. Feem ntau, yas-} Raws cov ntaub ntawv zaj duab xis muaj 1% -7%, thiab txawm tias muaj cov ntsiab lus noo noo, thiab txawm tias muaj cov ntsiab lus noo noo nyob ib ncig ntawm 3%. Vim yog cov ntsiab lus noo noo ntawm cov substrates, txheej chambers tau hloov kho los ntawm thawj zaug {{14} {{15} - chamber qauv qauv.
Cov chaw evaporation tau muaj peev xwm tiv taus, inductive, Electron nqaj, lossis cov hlauetron sputtering. Dual {- Cov txheej txheem txheej txheem tau siv dav, thiab lawv cov txiaj ntsig yog:} Lawv tuaj yeem tso cov ntawv sau tseg hauv cov khoom siv loj loj thaum ua kom zoo dua qub. Qhov ntau ntawm cov roj tso tawm ntawm daim ntawv yog sab sab ntawm lub tshuab winding. Vim tias qhov sib txawv ntawm lub tshuab winding thiab cov vapor oidping chamber yog nqaim heev, cov roj tso tawm tsis zoo li yuav nkag mus rau Vapor Depetitional; ②②②② - Cov txheej txheem loj dua yuav tsum muaj cov roj teeb loj, thaum siv cov khoom siv me me, txo cov nqi thiab txuag lub zog; ③ Kev tshem tawm cov chav ntxuav tawm thiab cov vapor deposition chamber luv luv lub sijhawm luv.
Ntxiv nrog rau cov qauv dav dav ntawm cov khoom siv nqus plua plav, dov {{} {1} {} {1} {1} {1} {1} {1} {1} {1} {1}- Vim hais tias lub substrate tau coated yog ntawv lossis yas, uas yuav tsum tau muaj roj ntau ntxiv, lub nqus plua plav tuaj yeem yog ib leeg {{{{4 4}} chamber.
